VBC's SEMIFLEX® vacuum-jacketed piping, Triax piping and phase separation technologies support LN₂ requirements across semiconductor manufacturing.
Woburn, MA – Vacuum Barrier Corporation, a leader in the design, engineering, and fabrication of liquid nitrogen dosing and piping systems, will showcase solutions engineered for semiconductor manufacturing at SEMICON West, October 13–15 at the Moscone Center in San Francisco. VBC will exhibit at Booth 5371. Liquid nitrogen (LN₂) plays an important role throughout semiconductor manufacturing, from environmental testing of individual chips to demanding front-end epitaxy and molecular beam epitaxy (MBE) processes.
At SEMICON West, VBC will highlight technologies designed to address two important semiconductor requirements: efficiently distributing LN₂ from bulk storage to multiple points of use and supplying low-pressure, high-quality single-phase LN₂ for advanced wafer-growth applications.
For semiconductor back-end testing, individual chips frequently undergo environmental testing that includes cold-shock and cold-cycle testing. These operations can require LN₂ at dozens of locations throughout a manufacturing facility. VBC's vacuum-jacketed piping and vapor vent technologies help maintain a constant supply of liquid nitrogen across multiple use points while minimizing losses.
Cleanliness is another important consideration. Because of the semiconductor industry's stringent environmental requirements, LN₂ piping must operate without introducing unwanted frost and moisture around production equipment. Vacuum jacketing, specialized bayonet connections, and end traps help limit heat gain and support clean, frost-free operation while keeping LN₂ readily available at the point of use.
SEMIFLEX® modular piping and connections also allow LN₂ to be distributed to multiple locations and provide the ability to reconfigure the distribution network as production requirements change. Vapor vents help maintain liquid availability, while vacuum jacketing across connections and components improves thermal efficiency.
VBC will also highlight cryogenic technology for epitaxy and MBE applications, where process requirements differ significantly from conventional LN₂ distribution.
Epitaxy takes place within an ultra-high-vacuum chamber to produce materials with high levels of purity and precision. Liquid nitrogen cryoshrouds can be used to remove residual gases and achieve the required vacuum conditions. VBC combines a modulating inlet phase separator with Triax supply piping to ensure subcooled, single-phase LN₂ circulates through the shroud for effective cryopumping.
Within this configuration, two-phase LN₂ is supplied to a phase separator mounted above the MBE system. A modulating inlet valve maintains LN₂ level through differential level control. The hydrostatic head of the liquid slightly subcools the LN₂ as it enters the shroud. As the liquid absorbs heat, its density decreases to create passive flow, with warmer LN₂ and gas returning to the phase separator.
The result is a system designed to provide clean, frost-free cooling and maintain low-pressure, single-phase liquid with completely wetted surfaces—important characteristics for demanding epitaxy applications.
VBC representatives will be available throughout SEMICON West to discuss LN₂ distribution for semiconductor facilities, back-end environmental testing, epitaxy and MBE applications, and other cryogenic process requirements.
Visit Vacuum Barrier Corporation at SEMICON West, October 13–15 at the Moscone Center in San Francisco, Booth 5371.
About Vacuum Barrier Corporation
Vacuum Barrier Corporation (VBC) is a leader in designing, engineering, and fabricating liquid nitrogen dosing and piping systems for various industries, including food & beverage, semiconductor, pharmaceutical, and biotech.
Since 1958, the company has specialized in delivering tailored liquid nitrogen solutions, both custom and standard, to meet the unique requirements of its clients. As a one-stop source for complete system integration, Vacuum Barrier Corporation consistently upholds the highest safety and quality standards. www.vacuumbarrier.com